HBO 5500W/PIL - Osram Microlithography ASML i-Line

Order code: 300-00-914501953
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£ 4,138.04
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Downloads
Product datasheet 5500 PIL 2017-03 E.pdf
Product specifications
Order code 300-00-914501953
Brand Osram
Power 5500W
Base SFCX 42.5-6
Life 1500h
Diameter 85mm
OAL 355mm
LCL 154mm
Prod. type ASML
Cross reference
ASML XT 4xOE
ASML AT 400B/C/D
ASML PAS 5500/450F